Turowski, Marcus; Jupé, Marco; Ehlers, Henrik; Melzig, Thomas; Pflug, Andreas; Ristau, Detlev
(Bellingham, WA : S P I E - International Society for Optical Engineering, 2015)
Simulation and modeling find more and more their way into thin film technology. Beside theoretical models for layer design, pre-production design analysis, and real time process control, atomistic simulation techniques ...